Oxide sintered body and an oxide film obtained by using it, and a transparent base material containing it

ABSTRACT

The oxide sintered body mainly consists of gallium, indium, and oxygen, and a content of the gallium is more than 65 at. % and less than 100 at. % with respect to all metallic elements, and the density of the sintered body is 5.0 g/cm 3  or more. The oxide film is obtained using the oxide sintered body as a sputtering target, and the shortest wavelength of the light where the light transmittance of the film itself except the substrate becomes 50% is 320 nm or less. The transparent base material is obtained by forming the oxide film on one surface or both surfaces of a glass plate, a quartz plate, a resin plate or resin film where one surface or both surfaces are covered by a gas barrier film, or on one surface or both surfaces of a transparent plate selected from a resin plate or a resin film where the gas barrier film is inserted in the inside.

This application claims benefits of Japanese Application No. 2006-31201filed in Japan on Feb. 8, 2006, the contents of which are herebyincorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an oxide sintered body which mainlyconsists of gallium, indium, and oxygen, and a transparent base materialcomprising an oxide film obtained using the oxide sintered body and itsoxide film.

In particular, it relates to a transparent base material comprising anoxide sintered body having a low content of an indium oxide phase, andan oxide film with high light transmittance at a near-ultraviolet regionwherein a film is formed by using the oxide sintered body as asputtering target.

2. Description of the Related Art

Since a transparent conductive oxide film is excellent in electricalconductivity and light transmittance in a visible region, it has beenused as a transparent electrode of various devices.

As a practical thing, tin oxide (SnO₂) which contains antimony andfluorine as a dopant, zinc oxide (ZnO) which contains aluminium andgallium as a dopant, indium oxide (In₂O₃) which contains Sn as a dopantetc., have been known.

Especially, among them, the indium oxide film which contains Sn asdopant is called ITO (Indium-Tin-Oxide) film, and it has beenextensively used since the transparent conductive oxide film having lowresistance can be obtained easily.

As a method of forming a transparent conductive oxide film, thesputtering method, the evaporation method, the ion plating method, andthe chemical solution coating method have been used widely.

Among such methods, a sputtering method is an effective method, whenusing material with a low vapor pressure, or when precise film thicknesscontrol is needed.

In the sputtering method, generally, argon gas is used under gaspressure of about 10 Pa or less, a substrate is used as an anode, and asputtering target which is a raw material of the transparent conductiveoxide film to be formed as a cathode and voltage is supplied to them.

Between the electrodes to which voltage is applied, glow dischargeoccurs, and then argon plasma occurs, and argon ions in plasma collidewith the sputtering target of the cathode.

Particles which are flipped one after another off by this collision aredeposited one by one on the substrate, and a thin film is formed.

The sputtering method is classified according to generating method ofargon plasma. A method using plasma generated by high frequency power iscalled as RF sputtering method, and a method using plasma generated bydirect current power is called as direct current sputtering method.

Especially, the direct current sputtering method is an optimal filmforming method since it has such features that there are less heatdamages to a substrate, high-speed film forming is possible, powersupply equipment is cheap, and operation is simple and so on.

Generally, the direct current sputtering method is used for formation ofITO film.

The ITO film formed at room temperature shows low specific resistance of5×10⁻⁴ Ω·cm.

The ITO film is good also about the light transmittance of a visibleregion, and has the light transmittance of an average of 80% or more.

Moreover, it is excellent at chemical and thermal stability.

The luminescent material and luminescence device which have a functionof near-ultraviolet light luminescence (for example, wavelength of 300nm˜400 nm) (for example, LED, laser, organic or inorganic EL) have beenwidely used and these development have been made briskly.(with respectto a near-ultraviolet LED, refer to Applied physics, volume 68 (1999),No. 2, pp. 152-155, and SEI Technical Review, September, 2004 (No. 165),and pp. 75˜78) Applied physics, the 68th volume (1999), No. 2, pp.152˜155 and the SEI technical review, the September, 2004 (No. 165), andpp. 75˜78)

A transparent electrode is indispensable to these electron devices also.

In a conventional luminescence device in which importance is given tovisible light with wavelength of 400 nm˜800 nm, the ITO film and thetransparent conductive oxide film of ZnO and the like or SnO₂ and thelike have been used as a transparent electrode.

These conventional transparent conductive oxide films hadcharacteristics such that an average transmittance of a visible lightwith wavelength of 400 nm˜800 nm is excellent, but to a near ultravioletlight with wavelength that was short wave less than 400 nm,transmittance was not sufficient since an absorption occurs at thewavelength of 400 nm.

The following proposals have been made for a transparent conductiveoxide film applied to a luminescent material or a luminescence device(for example, LED, laser, organic or inorganic EL) which has aluminescence function of the near-ultraviolet light (for example,wavelength of 300 nm-400 nm).

In Japanese published unexamined patent application Toku Kai Hei7-182924, it has been proposed that gallium indium oxide (GaInO₃) whichis doped by a little amount of different valent dopants like aquadrivalent ion.

It is disclosed that since a crystal film of this oxide is excellent attransparency and has low refractive index of about 1.6, refractive-indexconsistency with a glass substrate is improved, and furthermore,electrical conductivity comparable as that of a broad prohibition areasemiconductor which has been currently used can be realized. However, asfor the crystal film disclosed there, absorption of a near-ultravioletlight occurs, and it is difficult to use it industrially withoutimprovement since film forming at a high temperature, that is, asubstrate temperature of 250° C.˜500° C. is required.

In Published Unexamined Patent Application Toku Kai 2002-093243, anultraviolet transparent conductive oxide film has been proposed, and ithas been disclosed that the ultraviolet transparent conductive oxidefilm is characterized in that it consists of Ga₂O₃ crystal, and in therange of the wavelength of 240 nm˜800 nm, or wavelength (240 nm˜400 nm),it is transparent, and has electrical conductivity owing to an oxygendefect or a dopant element, and manufacturing is carried out by usingone of methods of pulsed laser deposition method, sputtering method, CVDmethod, and MBE method under such condition that one element or moreelements of Sn, Ge, Si, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, and W is used asa dopant, and a substrate temperature is set at 600° C.˜1500° C., andoxygen partial pressure is set at 0˜1 Pa, have been shown.

In order to acquire electrical conductivity, it is necessary to form afilm of Ga₂O₃ crystal film shown in the above, at a substratetemperature of 600° C.˜1500° C.

Since this temperature range is too high, industrial use is verydifficult.

Recently, inventors of the present invention have found, as disclosed inthe patent application No. 2005-252788, a new transparent conductivethin laminated film, which has not only a high transmittance in avisible region, and a low surface resistance (6 Ω/□˜500 Ω/□), but alsohas a high light transmittance in a visible light short wavelengthregion with wavelength of 380 nm˜400 nm and also in a near-ultravioletlight region (300 nm˜380 nm) of short wavelength.

Namely, the inventors have found out that the above-mentioned subjectcan be solved, by having paid attention to a transparent conductive filmhaving a lamination structure in which a surface of a metal thin film iscovered by a transparent thin film of oxide, in a transparent conductivefilm wherein the transparent thin film of oxide is thin film of anamorphous oxide which mainly consists of gallium, indium, and oxygen, orthe transparent thin film of the amorphous oxide which mainly consistsof gallium and oxygen, and the gallium contained in the transparent thinfilm of oxide is contained at a rate 35 at. % or more, and less than 100at. % to all metal atoms.

SUMMARY OF THE INVENTION

The object of the present invention is to provide an oxide film having ahigh light transmittance in a near-ultraviolet light region where ashortest wavelength in which the light transmittance of the film itselfbecomes 50% or more is 320 nm or less, or an oxide sintered body whichcan be used for a sputtering target required for obtaining the oxidefilm, and furthermore a transparent base material containing theobtained oxide film.

After having eagerly studied various kinds of oxide sintered bodies inorder to attain such purposes, the inventors of the present inventionhave found that an oxide sintered body which mainly consists of gallium,indium, and oxygen, wherein a content of the gallium is more than 65 at.% and less than 100 at. % with respect to all metallic elements, and acontent of the gallium is preferably more than 65 at. % and 90 at. % orless with respect to all metallic elements, is very useful as a sourceof oxide film formation.

The inventors have found that when an oxide film is formed by asputtering method by using this oxide sintered body as a sputteringtarget for example, an amorphous oxide film wherein the oxide film whichmainly consists of gallium, indium and oxygen, and a content of thegallium is more than 65 at. % and less than 100 at. % with respect toall metallic elements, and a content of the gallium is preferably morethan 65 at. % and 90 at. % or less with respect to all metallicelements, is an oxide film in which a shortest wavelength, where thelight transmittance of the film itself becomes 50%, is 320 nm or less.

Furthermore, in order to obtain such an oxide film, the inventors havefound out that it is necessary to form a film using the sputteringtarget which can control generation of a indium oxide phase (In₂O₃phase) of the bixbyite type structure which causes decrease of lighttransmittance of an oxide film at a wavelength of 400 nm or less, andeventually they have invented the present invention.

Namely, the first invention of the present application provides an oxidesintered body characterised in that it mainly consists of gallium,indium, and oxygen, wherein a content of the gallium is more than 65 at.% and less than 100 at. % with respect to all metallic elements, and adensity of the sintered body is 5.0 g/cm³ or more

The second invention of the present application provides the oxidesintered body of the claim 1, wherein a content of the gallium is morethan 65 at. % and 90 at. % or less with respect to all metallicelements, and a density of the sintered body is 5.5 g/cm³ or more andwhen it is used as a sputtering target, it is possible to form a film bythe direct current sputtering method.

The third invention of the present application provides the oxidesintered body of the claim 1 or 2, wherein it is constituted by onephase or more selected from a gallium-oxide phase which has β-Ga₂O₃ typestructure (β-Ga₂O₃ phase), a gallium-indium-oxide phase having β-Ga₂O₃type structure (β-GaInO₃ phase) or (Ga, In)₂O₃ phases.

The fourth invention of the present application provides the oxidesintered body according to the claim 1 or 2, wherein it is constitutedby one phase or more phases selected from a gallium oxide phase whichhas β-Ga₂O₃ type structure (β-Ga₂O₃ phase), an oxide of gallium indiumphase having β-Ga₂O₃ type structure (β-GaInO₃ phase), or (Ga, In)₂O₃phases, and it is constituted by an indium oxide phase (In₂O₃ phase) ofbixbyite-type structure, a ratio in which the indium oxide phase (In₂O₃phase) of the bixbyite-type structure is contained is 5% or less in termof X-ray diffraction peak intensity ratio defined by the followingformula (1).

In₂O₃ phase (400)/{β-Ga₂O₃ phase (−202)+β-GaInO₃ phase(111)+(Ga,In)₂O₃phase (2 θ≈33°)}×100 [%]  (1)

The fifth invention of the present application provides the oxidesintered body according to the claims 1 to 4, wherein the sintered oxideis sintered by a hot pressing method under an inert gas atmosphere, at800° C,˜1000° C. of sintering temperature and under condition ofpressure 4.9 MPa˜29.4 MPa, and it does not have a metal indium phase.

The sixth invention of the present application provides an oxide filmcharacterised in that the oxide film is obtained by the sputteringmethod, using one of the oxide sintered body according to the first tofifth invention as a sputtering target and it is an oxide film whichmainly consists of gallium, indium, and oxygen, and it has a gallium,and a content of the gallium is more than 65 at. % and less than 100 at.% with respect to all metallic elements, and a shortest wavelength,where the light transmittance of the film itself excluding a substratebecomes 50%, is 320 nm or less.

The seventh invention of the present application provides the oxide filmaccording to the sixth invention characterized in that the oxide film isan amorphous film.

The eighth invention provides the oxide film according to the sixth orseventh invention characterized in that the arithmetic mean height (Ra)is 1.0 nm or less.

The ninth invention of the present application provides an transparentbase material characterized in that an oxide film of one of the sixth toeighth inventions is formed on a glass plate, a quartz plate, a resinplate or resin film where one surface or both surfaces are covered by agas barrier film, or on one surface or both surfaces of a transparentplate selected from a resin plate or a resin film where the gas barrierfilm is inserted in the inside.

The tenth invention of the present application provides the transparentbase material of the ninth invention characterized in that the gasbarrier film is constituted by one film or more films selected from ansilicon oxide film, an silicon oxide nitride (SiON) film, an aluminumacid magnesium film, a tin oxide type film, and a diamond-like carbon(DLC) film.

The eleventh invention of the present application provides thetransparent base material according to the tenth invention characterisedin that a material of the resin plate or the resin film comprisespolyethylene terephthalate (PET), polyether sulfone (PES), polyarylate(PAR), polycarbonate (PC), polyethylenen aphthalate (PEN) or alamination structure where a surface of such materials is covered byacrylic organic substance.

According to the present invention, an oxide sintered body which enablesto be used as a sputtering target and form an oxide film which transmitsnear-ultraviolet light can be obtained. So far, such oxide sintered bodycannot have been obtained.

Such oxide film obtained by the present invention, by laminating with ametal film, can be used as an electrode of a device using LED or laseror, organic or inorganic EL for blue light but also a near-ultravioletlight.

Since it becomes possible to obtain high light transmittance in avisible light short wavelength region and a near-ultraviolet lightregion of wavelength used, it is industrially useful.

Further, when it is used as an electrode for a self-luminescence typeelement, such as an organic EL device, an extraction efficiency of thelight of a visible light short wavelength region and also anear-ultraviolet light can be raised. Extraction efficiency can beraised.

Furthermore, an oxide film of the present invention, has an advantagethat by using the sputtering method, especially the direct currentsputtering method which is a thin film producing method used extensivelyindustrially, it can be formed also on a substrate in which the filmforming is required at low temperature (room temperature ˜100° C.).

These and other objects as well as the features and advantages of thepresent invention will become apparent from the detailed description ofthe preferred embodiments when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a table showing target evaluation of embodiments 1 and 2 of asintered body according to the present invention.

FIG. 2 is a table showing target evaluation of a first comparativeexample of the sintered body.

FIG. 3 is a table showing target evaluation of a third to eightembodiments of the sintered body according to the present invention.

FIG. 4 is a table showing target evaluation of the second comparativeexample of the sintered body.

FIG. 5 is a table showing thin film evaluation of embodiments 9 and 10of the oxide film according to the present invention.

FIG. 6 is a table showing thin film evaluation of a third comparativeexample of the oxide film.

FIG. 7 is a table showing thin film evaluation of embodiments 11 to 14of the oxide film according to the present invention.

FIG. 8 is a table showing thin film evaluation of a fourth comparativeexample of the oxide film.

FIG. 9 is a table showing thin film evaluation of embodiment 15 of theoxide film according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The oxide sintered body, the oxide film, and the transparent basematerial containing it according to the present invention will beexplained in detail hereafter. However, the present invention is notlimited to the following embodiments.

The oxide sintered body according to the present invention, comprises anoxide sintered body which mainly consists of gallium, indium, andoxygen, wherein a content of the gallium is more than 65 at. % and lessthan 100 at. % with respect to all metallic elements, and the density ofthe oxide sintered body is 5.0 g/cm³ or more.

Further, the oxide sintered body comprises gallium, a content of whichis more than 65 at. % and 90 at. % or less with respect to all metallicelements, and the density of the sintered body is 5.5 g/cm³ or more, andwhen it is used as a sputtering target, it is possible to form a film bya direct current sputtering method.

Furthermore, the oxide sintered body according to the present inventionis an oxide sintered body which mainly consists of gallium, indium, andoxygen. However, if it is mainly constituted by the above-mentionedelements, other inevitable impurity can be included.

It is desired that the above-mentioned oxide sintered body isconstituted by one phase or more phases selected from a gallium-oxidephase which has β-Ga₂O₃ type structure (β-Ga₂O₃ phase), agallium-indium-oxide phase having β-Ga₂O₃ type structure (β-GaInO₃phase), or (Ga, In)₂O₃ phases.

When the oxide sintered body has one phase or more phases selected froma gallium-oxide phase which has β-Ga₂O₃ type structure (β-Ga₂O₃ phase),a gallium-indium-oxide phase which has β-Ga₂O₃ type structure (β-GaInO₃phase), or (Ga, In)₂O₃ phase phases, and it is constituted by an indiumoxide phase (In₂O₃ phase) of bixbyite type structure, it is desirablethat a ratio in which the indium oxide phase (In₂O₃ phase) of thebixbyite type structure is contained is 5% or less in term of X-raydiffraction peak intensity ratio defined by the following formula (1).

In₂O₃ phase (400)/β-Ga₂O₃ phase (−202)+β-GaInO₃ phase (111)+(Ga,In)₂O₃phase (2 θ≈33°)}×100 [%]  (1)

Here, information concerning the structure of each phase, has beenclearly shown by JCPDS cards which are 41-1103 (β-Ga₂O₃ phase), 21-0334(β-GaInO₃ phase), 14-0564((Ga,In)₂O₃ phase), and 06-0416 (In₂O₃ phase).

Main peaks of β-GaInO₃ phase and In₂O₃ phase in X-ray diffraction, arebased on (111) reflection and (222) reflection, respectively, but, sinceIn₂O₃ phase (222) reflection laps with β-GaInO₃ phase (002) reflection,with respect to In₂O₃ phase it is evaluated by (400) reflection havingthe next highest intensity.

The oxide sintered body which does not have a metal indium phase can beobtained by sintering the oxide sintered body in an inert gasatmosphere, at 800° C.˜1000° C. of sintering temperature by a hotpressing method, and under the condition of pressure 4.9 MPa˜29.4 MPa,

When an oxide film is formed by the sputtering method, using these oxidesintered bodies as a sputtering target for example, it is possible toobtain an oxide film such that it has a composition range wherein itmainly consists of gallium, indium and oxygen, and a content of thegallium is more than 65 at. % and less than 100 at. % with respect toall metallic elements, and more preferably, more preferably has acomposition range wherein a content of gallium is more than 65 at. % and90 at. % or less with respect to all metallic elements, and a shortestwavelength is 320 nm or less, where the light transmittance of the filmitself except a substrate is 50%.

Furthermore, in order to obtain the above-mentioned oxide film, it isdesired that a film is formed using as a sputtering target, an oxidesintered body in which generation of an indium oxide phase (In₂O₃ phase)of the bixbyite type structure, which causes fall of the lighttransmittance of an oxide film in the region of the wavelength of 400 nmor less, is suppressed.

The oxide sintered body according to the present invention mainlyconsists of gallium, indium and oxygen, and a content of the gallium ismore than 65 at. % and less than 100 at. % with respect to all metallicelements, and it is required that it is in a composition range excludinggallium-oxide.

Furthermore, it is required that the density of the oxide sintered bodyis 5.0 g/cm³ or more.

Here, when a content of gallium is 65 at. % or less, to all metallicelements, and an oxide film is formed by using this oxide sintered bodyas a sputtering target for example, a shortest wavelength where thelight transmittance of the film itself except a substrate is 50% exceeds320 nm.

Since sintering becomes remarkably difficult in a composition range ofgallium-oxide, it becomes difficult to obtain a high-density oxidesintered body.

When sputtering is performed by using an oxide sintered body that hasnot yet become high density, as a sputtering target, a problem occurs,namely, abnormal electric discharge of arc discharge etc. occurfrequently, and consequently, the shortest wavelength where the lighttransmittance of the film itself except a substrate becomes 50% is 320nm or less. Therefore, good quality oxide film cannot be obtained.

When the oxide sintered body having the density of the sintered bodyless than 5.0 g/cm³ is used as a sputtering target, generation of noduleand generating of arc discharge in long-time use occur, and filmcharacteristics of the oxide film obtained get worse.

Furthermore, in the oxide sintered body according to the presentinvention, it is more desired that it contains gallium content of whichis more than 65 at. % and 90 at. % or less with respect to all metallicelements, and the density of the sintered body is 5.5 g/cm³ or more, andwhen it is used as a sputtering target, forming of a film can be made bya direct current sputtering method.

The reason is that since an oxide sintered body in this range hassufficient conductivity and the density of the sintered body, abnormalelectrical discharge of arc discharge etc. does not occur, andaccordingly the direct current sputtering can be carried outsuccessfully.

In a direct current sputtering method mentioned here, a sputteringmethod (direct current pulsing method) in which a negative voltageapplied to a target is ceased periodically, and during the period, byapplying a low positive voltage, neutralization of positive charging iscarried out by electrons is also included.

The direct current pulsing method is desirable, since it has advantagessuch that a film can be formed while controlling arcing in a reactivesputtering using reactant gas of oxygen, and control of impedanceconsistency circuit like in the RF sputtering method is not required,and, film forming speed is quicker than that of the RF sputteringmethod.

Further, it is desired that the oxide sintered body according to thepresent invention is constituted by one or more phases selected from agallium-oxide phase which has β-Ga₂O₃ type structure (β-Ga₂O₃ phase), agallium-indium-oxide phase having β-Ga₂O₃ type structure (β-GaInO₃phase), or (Ga, In)₂O₃ phases.

Furthermore, it is desired that the oxide sintered body according to thepresent invention is constituted by one or more phases selected from agallium-oxide phase which has β-Ga₂O₃type structure (β-Ga₂O₃ phase ), agallium-indium-oxide phase having β-Ga₂O₃ type structure (β-GaInO₃ phase), or (Ga,In)₂O₃ phases, wherein it is constituted by an indium oxidephase (In₂O₃ phase) of bixbyite-type structure, a ratio in which theindium oxide phase (In₂O₃ phase) of the bixbyite-type structure iscontained is 5% or less in term of X-ray diffraction peak intensityratio defined by the following formula (1).

In₂O₃phase(400)/{β-Ga₂O₃}phase(−202)+β-β-GaInO₃ phase(111)+(Ga, In)₂O₃phase(2 θ≈33°)}×100 [%]  (1)

If the X-ray diffraction peak intensity ratio of the formula is 5% ormore, since a contribution to optical characteristics of the oxide filmby the indium oxide phase (In₂O₃ phase) having a bixbyite-type structureof a sputtering target is large, a shortest wavelength where the lighttransmittance of the film itself except a substrate is 50% exceeds 320nm.

Here, as for the indium oxide phase (In₂O₃ phase) of bixbyite-typestructure, it may be that in which oxygen deficit has been introduced,or a part of indium has been replaced by gallium. And, as for β-Ga₂O₃phase, it may be that in which oxygen deficit has been introduced, or itmay be that in which a part of gallium has been replaced by indium.

As for β-GaInO₃ phase and (Ga,In)₂O₃ phase, they may be those in whichoxygen deficit is introduced, or in which the atomic ratio of gallium toindium is somehow shifted from their stoichiometry.

The oxide sintered body according to the present invention is desirable,since an oxide sintered body which does not contain a metal indium phaseis obtained according to the oxide sintered body, wherein the oxidesintered body is sintered by the hot pressing method, and the sinteringcondition is such that in an inert gas atmosphere, sintering temperatureis 800° C.˜1000° C. and pressure is 4.9 MPa˜29.4 MPa.

Sintering is not fully carried out at a sintering temperature less than800° C. in an inert gas, but when it exceeds 1000° C., metal indium ismelted and it will ooze out.

The range of a pressure of 4.9 MPa˜29.4 MPa is desirable. When apressure is lower than this range, the sintering is not carried outenough. Therefore, good quality oxide sintered body with high densitycannot be obtained.

Even when the pressure is set at higher than this range, the density ofthe sintered body is not improved, and breakage of a mold used for thehot pressing occurs easily.

Furthermore, an oxide film of the present invention is an oxide filmobtained using the sputtering method, wherein the oxide sintered body isused as a sputtering target, and mainly consists of gallium, indium, andoxygen. The oxide film contains gallium, a content of which is more than65 at. % and less than 100 at. % with respect to all metallic elements,and it has an outstanding characteristics such that a shortestwavelength is 320 nm or less, where the light transmittance of the filmitself except a substrate is 50%. When a content of gallium is 65 at. %or less, to all metallic elements, as for the oxide film obtained, ashortest wavelength where the light transmittance of the film itselfexcept a substrate is 50% exceeds 320 nm.

Film of gallium oxide is not desirable, since as for the film of galliumoxide, it is difficult to obtain a high-density sintered body asmentioned above, and accordingly, it is difficult to obtain an oxidefilm having the shortest wavelength where the light transmittance of thefilm itself except a substrate is 50% becomes 320 nm or less.

It is desired that the oxide film according to the present invention isobtained by the direct current sputtering method which is anadvantageous film forming method industrially.

It is desired that the oxide film of the present invention is anamorphous film.

This is because the amorphous film has a good etching nature as comparedwith a crystalline substance film, and, it is because a flatness natureof the emulsion surface, which is considered important in an electrodeused especially for organic electroluminescence (EL), is excellent.

Furthermore, in the oxide film of the present invention, it is desiredthat the arithmetic mean height (Ra) is 1.0 nm or less.

Here, the arithmetic mean height (Ra) is based on the definition of JISB0601-2001.

When the arithmetic mean height (Ra) exceeds 1.0 nm, it is not desirablein a particular use in which the flatness nature of an emulsion surfaceis required, such as organic EL.

The transparent base material of the present invention can be obtainedby forming the oxide film of the present invention mentioned above onone surface side or both surface sides of a glass plate, a quartz plate,a resin plate or resin film where one side or both sides are covered bya gas barrier film, a transparent plate which were selected from a resinplate or a resin film where the gas barrier film is inserted in theinside.

A thin film transistor (TFT) and a metal electrode for driving it can beformed on the transparent plate mentioned above, as long as thetransparency of a substrate is not completely spoiled.

The above-mentioned resin plate or a resin film has the highpermeability of gas compared with a glass plate, on the other hand, aluminescence layer of an organic EL device or inorganic EL elementdeteriorates by moisture or oxygen, when the resin plate or the resinfilm is used as a substrate of these display elements, it is desirableto give a gas barrier film which suppresses passage of gas.

As the gas barrier film, it is desirable to form one film or more filmsbetween a transparent plate and an oxide film.

It is desired that the gas barrier film is one film or more filmsselected from a silicon oxide film, an silicon oxide nitride (SiON)film, an aluminum acid magnesium film, a tin oxide type film, and adiamond-like carbon (DLC) film.

Further, not only an inorganic film but also an organic film may beincluded in the gas barrier film.

Here, tin oxide type film is defined that it has a composition whichcontained one element or more elements of additional elements selectedfrom for example, Si, Ce, Ge, etc, in tin oxide.

By these additional elements, a tin oxide layer is made amorphous and aprecise film is formed.

It is possible to use a composition such that the oxide film is formedon a base substrate wherein a gas barrier film that is one film or morefilms selected from a silicon oxide film, an silicon oxide nitride(SiON) film, an aluminum acid magnesium film, a tin oxide film, and adiamond-like carbon (DLC) film, and an organic film or a high polymerfilm are laminated repeatedly and alternately, on a surface of a resinbase plate or a resin film.

The gas barrier film may be formed on one surface of the resin plate orthe resin film. If it is formed on both surfaces, an interceptionfunction of gas passing becomes further better.

Further, by forming a gas barrier film on one surface side of the resinplate or the resin film, and further laminating the resin plate or theresin film on such gas barrier film, a composition in which the gasbarrier film is inserted can be obtained.

Furthermore, it can be a composition in which laminating are made outrepeatedly.

It is desired that the resin plate or the resin film consists ofpolyethylene terephthalate (PET), polyether sulfone (PES), polyarylate(PAR), polycarbonate (PC), or polyethylenenaphthalate (PEN), orlamination structure having a surface of such materials covered withacrylic organic substance. However, it is not limited within the scopementioned above.

The thickness of the resin plate or the resin film is suitably selectedaccording to the following concrete uses.

When using the transparent base material as an electrode of a deviceusing LED, a laser, an organic or inorganic EL, which emits blue andnear-ultraviolet light,

It is industrially useful, since it becomes possible to obtain highlight transmittance in a visible light short wavelength region as wellas a near-ultraviolet light region of wavelength.

Further, it is useful when it is used as an electrode for elements of aself-luminescence type, such as an organic EL device etc., since anextraction efficiency of the light of the near-ultraviolet region can beraised.

Embodiment

Hereafter, the present invention will be explained more concretely byusing embodiments.

1) Production of an Oxide Sintered Body

The sintered body has been produced by an atmospheric pressure sinteringmethod described below.

Gallium oxide powder and indium oxide powder of purity 4N were grindedby a ball mill and adjusted to the average particle diameter of 3micrometers or less, respectively. Then, they were blended so that theatomic ratio of gallium to all metallic elements might become to adesired ratio, and mixed with the ball mill with an organic binder, adispersant, and a plasticizer for 48 hours, and consequently slurry wasproduced.

Obtained slurry was dried out with a spray dryer, and granulation powderwas produced.

Then, obtained granulation powder was put into a rubber mold, and aforming object with 191 mm φ, thickness of about 6 mm was produced witha hydrostatic pressure pressing machine.

In an oxygen gas flow, the forming object obtained by the same way, wassintered under an ordinary pressure at a predetermined temperature (itis shown in an embodiment) for 20 hours.

In addition to the atmospheric pressure sintering method, the oxidesintered body was produced also by the hot pressing method.

Then, the gallium oxide powder and the indium oxide powder were blendedso that the atomic ratio of gallium to all metallic elements mightbecome to a desired ratio, and then, they were agitated by athree-dimensional mixer and precursor powder was produced.

By supplying mixed powders obtained into a container made of carbon,sintering was carried out using the hot pressing method under each ofconditions.

In order to prevent degradation by oxidization of the container made ofcarbon, it was carried out in Ar gas atmosphere.

The pressure was fixed to 24.5 MPa, sintering temperature was made at apredetermined temperature (it is shown in an embodiment), and sinteringtime was set constant in 3 hours.

Then, circumference processing and surface grinding processing weregiven to the obtained sintered body, and it was made about 15.24 cm (6inches) in diameter, and formed about 5 mm in thickness.

After the processing, bonding of the sintered body was carried out to acopper plate for cooling, and a sputtering target was obtained.

2) Production of a Thin Film

TOKU SPF-530H (manufactured by ANELVA) was used for sputteringequipment. A synthetic quartz plate was used as a substrate, and it wasarranged so that it may become parallel to a target surface.

Distance between the substrate and the target was set to 60 mm.

Sputtering gas was mixed gas which consisted of argon and oxygen, andtotal gas pressure was set to 0.5 Pa while oxygen ratio was set to 1.0%to 2.0%.

Electrical power used was set to 200 W.

Film forming by direct-current magnetron sputtering was carried outunder conditions mentioned above.

According to a target to be used, sputtering-time was adjusted and athin film with 200 nm in thickness was formed.

In case that the direct current sputtering was unable to be used, thefilm was formed by sputtering of direct current pulsing method.

Other sputtering conditions were set to be equivalent to those of thedirect current sputtering.

3) An Oxide Sintered Body and Thin Film Evaluation

As for the oxide sintered body and the thin film which were obtained,the atomic ratio of gallium to all metallic elements, was computed fromweights of indium and gallium which were obtained by ICP emissionspectral analysis method (SPS4000 made by Seiko Instruments Inc. wasused).

The density of the oxide sintered body was measured using pure water byArchimedes method (Automatic Densimeter-H made by TOYO SEIKISEISAKU-SHO, Ltd was used).

The film thickness of the oxide film was measured with a surfaceprofiler (Alpha-Step IQ made by KLA-Tencor co., Ltd.).

The specific resistance of the oxide sintered body and the oxide filmwas computed from the surface resistance measured by the four-probemethod (LORESTA-IP, MCP-T250 made by Mitsubishi Chemical was used).

The light transmittance (T_(S+F) (%)) of the oxide film including thesubstrate was measured with a spectrophotometer (U-4000 made by theHitachi, Ltd.).

Under the same conditions, the light transmittance (T_(S) (%)) of asubstrate only was also measured, and (T_(S+F)/T_(S))×100 was computedas light transmittance (T_(F) (%)) of the film itself excluding thesubstrate.

The X-ray diffractions of the oxide sintered body and the oxide filmwere measured with X-ray diffraction equipment (CuK α-rays made by theRigaku Industrial Co. was used).

As to the oxide sintered body, a peak intensity was obtained by In₂O₃phase (400), β-Ga₂O₃ phase (−202), β-GaInO₃ phase (111) and (Ga, In)₂O₃phase (2 θ≈33°). Then, a peak intensity ratio of In₂O₃ phase (400)expressed by the following formula (1) was calculated.

In₂O₃ phase (400)/{β-Ga₂O₃ phase(−202)+β-GaInO₃ phase (111)+(Ga,In)₂O₃phase(2 θ≈33°)}×100 [%]  (1)

The arithmetic mean height (Ra) was measured by an atomic forcemicroscope (Nanoscope III AFM, made by Digital Instruments Corp. wasused).

Embodiments 1 and 2

Indium oxide powder and gallium oxide powder were blended so that theatomic ratio of gallium to all metallic elements might become 65.5 at.%, and the atmospheric pressure sintering was carried out under twoconditions where sintering temperatures were at 1400° C. and 1500° C.,and consequently, the sputtering target was produced.

Next, the direct current sputtering was tried at room temperature usingthese two kinds of sputtering targets.

An evaluation result of the targets was shown in FIG. 1.

As shown in FIG. 1, when the sintering temperature of the embodiment 1was 1400° C., the atomic ratio of gallium to the all metallic elementsof the obtained oxide sintered body was 65.6 at. %.

Here, the density of the oxide sintered body was 6.04 g/cm³, and thephase which constitutes the sintered body was β-GaInO₃ phase.

Therefore, the peak intensity ratio of In₂O₃ phase (400) expressed withthe formula (1) mentioned above was 0%.

When the sintering temperature of the embodiment 2 was 1500° C., theatomic ratio of gallium to all metallic elements was 65.2 at. %, thedensity of the sintered body was 6.02 g/cm³, the formed phase was only(Ga,In)₂O₃ phase, and the peak intensity ratio of In₂O₃ phase (400)expressed with the formula (1) mentioned above was 0%.

When the direct current sputtering was carried out at room temperatureusing these two kinds of sputtering targets, any abnormalities, such asarc discharge, were not seen, and it was confirmed that the sputteringwas successful.

Comparative Example 1

Except having set the atomic ratio of gallium to all metallic elementswas 58.5 at. %, a sputtering target was produced as same to theembodiment 1, and direct current sputtering was tried.

The evaluation result of the target was shown in FIG. 2.

As shown in FIG. 2, in the comparative example 1, the atomic ratio ofgallium to all metallic elements of the sintered body was 58.3 at. %,and the density of the sintered body was 6.28 g/cm³.

The sintered body is constituted by β-GaInO₃ phase and In₂O₃ phase, andthe peak intensity ratio of In₂O₃ phase (400) expressed with the formula(1) mentioned above was 7%.

In the direct current sputtering at room temperature using thesputtering target, no abnormality such as arc discharge was seen, and itwas confirmed that the sputtering was carried out successfully.

Embodiments 3 to 8

Indium oxide powder and gallium oxide powder were blended so that theatomic ratio of gallium to all metallic elements might vary 65.5˜99 at.%, and sintering was carried out by the hot pressing method under threeconditions of sintering temperature at 800° C.˜100° C., andconsequently, the sputtering target was produced.

Then, the direct current sputtering was tried at room temperature usingthese three kinds of sputtering targets.

An evaluation result of the targets was shown in FIG. 3.

As shown in FIG. 3, in the cases of Embodiments 3-8, the atomic ratio ofgallium to all metallic elements was 65.4 to 99.1 at. %, and the densityof the sintered body was 5.02 to 6.12 g/cm³, and consequently, goodsintered body was obtained.

Next, it was confirmed that these sintered bodies are constituted by theβ-GaInO₃ phase, β-Ga₂O₃, or the these two phases.

The peak intensity ratio of In₂O₃ phase (400) expressed with theabove-mentioned formula (1) was 0% also in each of cases.

However, only in the embodiment 5, generation of In₂O₃ phase was seen,and the peak intensity ratio of In₂O₃ phase (400) expressed with theformula (1) mentioned above was 5%.

When the direct current sputtering was carried out at room temperatureusing these oxide sintered bodies as sputtering targets, in embodiments3˜7, namely, in a range where the atomic ratio of gallium to allmetallic elements was 65.4˜89.9 at. %, any abnormalities, such as arcdischarge, were not seen, and it was confirmed that the sputtering wascarried out successfully. However, in case that the atomic ratio ofgallium to all metallic elements of the embodiment 8 was 99.1 at. %, thedirect current sputtering method was not possible.

Comparative Example 2

Except that the hot pressing method was carried out at a sinteringtemperature of 1100° C., the sputtering target was produced as same asin embodiments 3 and 4, and the direct current sputtering method wastried.

An evaluation result of the target was shown in FIG. 4.

As shown in FIG. 4, the atomic ratio of gallium to all metallic elementswas 65.3 at. % in the comparative example 2, but the density of thesintered body was low as 4.89 g/cm³, and good sintered body was not ableto be obtained.

A trace showing that during sintering Indium was melted and oozed wasseen.

The sintered body is constituted by β-GaInO₃ phase, In phase, and In₂O₃phase, and the peak intensity ratio of In₂O₃ phase (400) expressed withthe formula (1) mentioned above was high, that is 12%.

This is presumed to be due to the melting and oozing of indium.

In the direct current sputtering at room temperature using thesputtering target,

Arc discharge occurs frequently, and consequently good sputtering statewas not acquired.

Embodiments 9 and 10

By using the sputtering target produced in embodiments 1 and 2, thedirect current sputtering was carried out at the room temperature, andthin films were formed.

Evaluation results of the obtained films are shown in FIG. 5.

The atomic ratio of gallium to the all the metallic elements of thefilms obtained by the ICP emission spectral analysis method, were 65.6at. % and 65.2 at. %, where the composition of the sputtering targets inembodiments 1 and 2 were reproduced.

The shortest wavelength where the light transmittance of the film itselfexcluding the substrate becomes 50% was 320 nm or less in each case.

As for the arithmetic mean height (Ra), it was confirmed that all werearound 0.5 nm, and 1.0 nm or less.

As the result of the X-ray diffraction measurement of the obtainedfilms, it was also confirmed that it was an amorphous film in each case.

It was shown that these films had electric conductivity and, thespecific resistance of embodiment 9 and 10 were 7.1×10⁻¹ Ω*cm and6.3×10⁻¹ Ω·cm, respectively.

Comparative Example 3

By using the sputtering target produced in the comparative example 1,the direct current sputtering was carried out at room temperature, and athin film was formed.

An evaluation result of the obtained film is shown in FIG. 6.

The atomic ratio of gallium to the all metallic elements of the obtainedfilm by the ICP emission spectral analysis method, was 58.7 at. %, wherethe composition of the sputtering target in the comparative example 1was reproduced.

However, the shortest wavelength where the light transmittance of thefilm itself excluding the substrate becomes 50% was 332 nm. It did notbecome 320 nm or less.

However, as for the arithmetic mean height (Ra), it was confirmed thatit was around 0.5 nm, and 1.0 nm or less.

As a result of the X-ray diffraction measurement of the obtained film,it was confirmed that it was an amorphous film.

It was shown that this film had conductivity and its specific resistancewas 1.1×10⁻¹ Ω·cm.

Embodiments 11 to 14

In embodiments 4, and 6 to 8, the sputtering targets were produced bythe hot pressing method on condition of a sintering temperature of 900°C. The direct current sputtering was carried out at the roomtemperature, and thin films were formed using them.

Since by the sputtering target of embodiment 8, the direct currentsputtering was unable to be carried out, the thin film was formed bysputtering by the direct current pulsing method.

Evaluation results of the obtained thin films are shown in FIG. 7.

The atomic ratio of gallium to the all metallic elements of the thinfilms obtained by the ICP emission spectral analysis method, were 65.5at. % to 99.5 at. %, where the composition of the sputtering targets inembodiments 4 to 7 were mostly reproduced.

The shortest wavelength where the light transmittance of the film itselfexcluding the substrate becomes 50% was 320 nm or less in each case.

Further, it was confirmed that the arithmetic mean height (Ra) is allaround 0.5 nm, and it is 1.0 nm or less in each case.

It was confirmed, as a result of the X-ray diffraction measurement ofthe obtained film, that it was an amorphous film in each case.

It was shown that the film of embodiment 10 had electric conductivityand its specific resistance was 5.8×10⁻¹ Ω·cm.

However, it was not shown that other films had electric conductivity.

Comparative Example 4

By using the sputtering target produced in the comparative example 2, anoxide film was formed by sputtering.

However, since by the sputtering target of this comparative example 2,direct current sputtering could not be carried out, the thin film wasformed by sputtering by a direct current pulsing method at roomtemperature.

An evaluation result of the obtained film is shown in FIG. 8.

As to the atomic ratio of gallium to all metallic elements of the thinfilm, which was obtained by the ICP emission spectral analysis method,it was 59.7 at. %, where gallium was less than composition of thesputtering target of the comparative example 2.

And, the shortest wavelength where the light transmittance of the filmitself excluding the substrate becomes 50% was 340 nm, which did notbecome 320 nm or less.

However, as for the arithmetic mean height (Ra), it was confirmed thatit was 0.62 nm, and 1.0 nm or less.

As a result of the X-ray diffraction measurement of the film obtained,it was confirmed that it was an amorphous film.

It was shown that this film had electrical conductivity and its specificresistance was 2.2×10¹ Ω·cm.

Embodiment 15

By using the sputtering target produced by the hot pressing method undercondition of sintering temperature 1000° C. in embodiment 5, the directcurrent sputtering was carried out at room temperature, and a thin filmwas formed.

An evaluation result of the thin film obtained is shown in FIG. 9.

The atomic ratio of gallium to the all metallic elements of the thinfilm obtained by the ICP emission spectral analysis method, were 65.1at. %, where the composition of the sputtering target in embodiment 5was mostly reproduced.

The sputtering target of embodiment 5 contained indium oxide phase(In₂O₃ phase) of bixbyite-type structure, which was 5% in term of thepeak intensity ratio of In₂O₃ phase (400) expressed with the formula (1)mentioned above. Nevertheless, the shortest wavelength where the lighttransmittance of the film itself excluding the substrate becomes 50% was320 nm or less.

As for the arithmetic mean height (Ra), it was around 0.5 nm. Thus, itwas confirmed that it was 1.0 nm or less.

As a result of the X-ray diffraction measurement of the film, it wasconfirmed that it was an amorphous film.

It was shown that the obtained film had electric conductivity and itsspecific resistance was 5.1×10⁻¹ Ω·cm.

Embodiment 16

Except that PET film (made by Toyobo Co., Ltd.) having 100 μm inthickness was used for a substrate, a thin film was formed on one ofsurfaces of the PET film under the same conditions as embodiment 9.

It was confirmed, by X-ray diffraction like in embodiment 9, that anobtained transparent conductive oxide film was an amorphous film.

As shown in embodiment 9, the shortest wavelength where the lighttransmittance of the film itself excluding substrate becomes 50% was 320nm or less. Nevertheless, the shortest wavelength where the lighttransmittance becomes 50% when the PET film was included was 324 nm,which was equivalent to 322 nm in case of the PET film itself.

It was confirmed that the arithmetic mean height (Ra) was 1.0 nm orless.

Embodiment 17

Except that a substrate having a barrier film in which asilicon-oxide-nitride film was formed on both surfaces of the PES film(made by Sumitomo Bakelite Co., Ltd.) of 200 μm in thickness was used asa substrate, a film was formed on both of surfaces of the film under thesame conditions as embodiment 12.

It was confirmed, by X-ray diffraction like in the embodiment 12, thatthe obtained transparent electric conduction film was an amorphous film.

As shown in embodiment 12, the shortest wavelength where the lighttransmittance of the film itself except the substrate becomes 50% was320 nm or less. Nevertheless, the shortest wavelength where the lighttransmittance becomes 50% when the PES film was included was 350 nm,which was equivalent to 350 nm in case of the PES film itself.

It was confirmed that the arithmetic mean height (Ra) was 1.0 nm orless.

Evaluation

From results in embodiments 1 to 8, it has been clear that no abnormalelectric discharge such as arc discharge etc., occurs, and accordingly agood sputtering can be achieved, when a sputtering is carried out usingas a sputtering target, the oxide sintered body of the present inventioncharacterized in that an oxide sintered body which mainly consists ofgallium, indium, and oxygen, wherein a content of which is more than 65at. % and less than 100 at. % with respect to all metallic elements, andthe density of the sintered body is 5.0 g/cm³ or more.

In particular, from results of embodiments 1 to 7, it has been clearthat no abnormal electric discharge such as arc discharge etc., occurs,and accordingly a good sputtering can be achieved, when the sputteringis carried out using as a sputtering target, an oxide sintered body ofthe present invention characterized in that an oxide sintered bodywherein a content of gallium of the present invention is more than 65at. % and less than 90 at. % with respect to all metallic elements, andthe density of the sintered body is 5.5 g/cm³ or more.

From the result of embodiments 3 to 8, it has been clear that noabnormal electrical discharge such as arc discharge etc., occurs, andaccordingly the direct current sputtering can be carried outsuccessfully, when an oxide sintered body of the present invention isused as a sputtering target, that is characterized in that an oxidesintered body which is sintered by the hot pressing method in an inertgas atmosphere under conditions in which sintering temperature is 800°C.˜1000° C. and sintering pressure is 4.9 MPa˜29.4 MPa, and it does notcontain metal indium phase.

Next, from the result of embodiments 9 to 15, it has been shown that theoxide film of the present invention namely, an oxide film obtained byusing a sputtering method, wherein the oxide sintered body according toembodiments 9 to 15 is used as a sputtering target, is an oxide filmwhich consists of gallium, indium, and oxygen, wherein the oxide filmhas gallium, a content of which is more than 65 at. % and less than 100at. % with respect to all metallic elements, and a shortest wavelengthwhere the light transmittance of the film itself excluding a substratebecomes 50%, is 320 nm or less, and it is an amorphous film and itsarithmetic mean height (Ra) is 1.0 nm or less.

In particular, from embodiment 15, it has been shown that the shortestwavelength where the light transmittance of the film itself excluding asubstrate becomes 50% is 320 nm or less, if an oxide film is obtained byusing as a sputtering target, the oxide sintered body according to thepresent invention, that is, an oxide sintered body characterized in thatit has one phase or more phases selected from a gallium-oxide phasewhich has β-Ga₂O₃ type structure (β-Ga₂O₃ phase), an gallium indiumoxide phase having β-Ga₂O₃ type structure (β-GaInO₃ phase), or (Ga,In)₂O₃ phases, wherein it is constituted by an indium oxide phase (In₂O₃phase) of bixbyite-type structure, and a ratio of the contained indiumoxide phase (In₂O₃ phase) in the bixbyite-type structure is 5% or lessin term of the X-ray diffraction peak intensity ratio defined by thefollowing formula (1),

In₂O₃ phase (400)/{β-Ga₂O₃ phase (−202)+β-GaInO₃ phase(111)+(Ga,In)₂O₃phase (2 θ≈33°)}×100 [%]  (1)

Contrary to this, it has been shown that in case of the oxide film inthe comparative example 3, that is, an oxide film obtained by thesputtering method, using as a sputtering target, an oxide sintered bodywhich does not satisfy the composition range of the comparative example1, the shortest wavelength where the light transmittance of the filmitself excluding a substrate becomes 50% exceeds 320 nm.

It has been also shown that the shortest wavelength where the lighttransmittance of the film itself excluding a substrate becomes 50%exceeds 320 nm with respect to an oxide film obtained by the sputteringmethod, by using as a sputtering target, an oxide sintered body in whichthe hot press conditions of the comparative example 1 are not satisfied,and the ratio of the contained indium oxide phase (In₂O₃ phase) havingthe bixbyite-type structure exceeds 5%.

From embodiments 16 and 17, it has been confirmed that the transparentbase material according to the present invention, that is, thetransparent base material characterized in that the oxide film of thepresent invention is formed on one surface or both surfaces of atransparent plate of a resin film wherein one surface or both surfacesare covered with a gas barrier film can be obtained.

1-7. (canceled)
 8. An oxide film, which is obtained by a sputteringmethod by using an oxide sintered body which mainly consists of gallium,indium and oxygen, with a content of the gallium being more than 65 at.% and less than 100 at. % with respect to all metallic elements, andwhich has a density being 5.0 g/cm³ or more, as a sputtering target,wherein a shortest wavelength at which light transmittance of the filmitself, excluding a substrate, becomes 50% is 320 nm or less.
 9. Theoxide film according to claim 8, wherein the oxide film is an amorphousfilm.
 10. The oxide film according to claim 8, wherein the arithmeticmean height (Ra) is 1.0 nm or less.
 11. A transparent base materialcomprising: an oxide film obtained by a sputtering method by using anoxide sintered body as a sputtering target, wherein 320 nm is a shortestwavelength at which light transmittance of the film, excluding asubstrate, becomes 50%, a glass plate, a quartz plate, a resin plate ora resin film on which the oxide film is formed, and a gas barrier filmcovering one surface or both surfaces of the glass plate, quartz plate,resin plate, or inserted inside a transparent plate on which the oxidefilm is formed on one surface or both surfaces thereof, the transparentplate being selected from a resin plate or a resin film with the gasbarrier film being inside, wherein the oxide sintered body: mainlyconsists of gallium, indium, and oxygen, has a gallium content of morethan 65 at. % and less than 100 at. % with respect to all metallicelements, and has a density of 5.0 g/cm³ or more.
 12. The transparentbase material according to claim 11, wherein the gas barrier film isconstituted by one or more films selected from a silicon oxide film, asilicon oxide nitride (SiON) film, an aluminum acid magnesium film, atin oxide type film, and a diamond-like carbon (DLC) film.
 13. Thetransparent base material according to claim 12, wherein the material ofthe resin plate or the resin film is polyethylene terephthalate (PET),polyether sulfone (PES), polyarylate (PAR), polycarbonate (PC), orpolyethylene naphthalate (PEN), or it comprises a lamination structurehaving a surface of such material covered with an acrylic organicsubstance.
 14. The oxide film according to claim 9, wherein thearithmetic mean height (Ra) is 1.0 nm or less.